发明名称 |
VACUUM EVACUATION SYSTEM, METHOD FOR OPERATING VACUUM EVACUATION SYSTEM, REFRIGERATING MACHINE, VACUUM EVACUATION PUMP, METHOD FOR OPERATING REFRIGERATING MACHINE, METHOD FOR CONTROLLING OPERATION OF TWO-STAGE REFRIGERATING MACHINE, METHOD FOR CONTRO |
摘要 |
<p>Multiple vacuum evacuation pumps each comprising a refrigerating machine are connected to a common compressor. At least one of the multiple vacuum evacuation pumps is operated so as to repeat an operation including a step in which the interior of a cylinder is shifted from a low-pressure state to a high-pressure state by the operation of a valve of the refrigerating machine and thereby gas in the low-pressure state is adiabatically compressed, and a step in which a displacer passes through the adiabatically compressed gas. At least another one of the multiple vacuum evacuation pumps is operated so as to repeat an operation including a step in which the interior of a cylinder is shifted from a high-pressure state to a low-pressure state by the operation of a valve of the refrigerating machine and thereby gas in the high-pressure state is adiabatically expanded, and a step in which a displacer passes through the adiabatically expanded gas.</p> |
申请公布号 |
WO2010038415(A1) |
申请公布日期 |
2010.04.08 |
申请号 |
WO2009JP04967 |
申请日期 |
2009.09.29 |
申请人 |
CANON ANELVA CORPORATION;OKADA, TAKAHIRO;AOKI, KAZUTOSHI;KOMAI, HISAYOSHI |
发明人 |
OKADA, TAKAHIRO;AOKI, KAZUTOSHI;KOMAI, HISAYOSHI |
分类号 |
F04B37/16;F04B37/08;F25B9/00;F25B9/14 |
主分类号 |
F04B37/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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