| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously obtain both the advantages of speeding up of inspection and improving the resolution. SOLUTION: A beam forming operation is carried out so as to lessen only a beam width in a desired direction, and a beam scanning operation is carried out by using the obtained beam in an elliptical shape in its major axis direction, thereby improving the resolution in its minor axis direction. COPYRIGHT: (C)2010,JPO&INPIT |
