摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a catalytic combustion type gas sensor installed in an environment which is easily poisoned by a sensitivity deterioration material. Ž<P>SOLUTION: In this catalytic combustion type gas sensor formed by allowing a carrier of a metal oxide sintered body stuck on a temperature measuring resistor to carry a catalyst, the catalytic combustion type gas sensor is poisoned at a temperature of 130-500°C in an atmosphere including at least one kind of hexamethyldisiloxane, hexamethyldisilazane and hexamethyldisilane as much as 10-30,000 ppm, until a change with time of a catalyst activity of the catalyst is stabilized at a prescribed value. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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