| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high voltage power source or the like constituted to apply a bias to an optical component in a charged particle beam processing system. <P>SOLUTION: The load circuit device has an auto bias activity load circuit (520) and a related high voltage power source (500). The high voltage power source is constituted to apply a bias on an optical component (530) in a charged particle beam processing system (100, 100', 100") such as a gas cluster ion beam (GCIB) processing system. The high voltage power source has a variable voltage source (510) having a load terminal at load potential and a reference terminal at reference potential, and an auto-bias activity load circuit (520) which is connected with the load terminal and the reference terminal and constituted so as to retain a variable voltage fall between the load potential and the reference potential while keeping a nearly constant current. <P>COPYRIGHT: (C)2010,JPO&INPIT |
