| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wire saw apparatus in which the lifetime of a wire is long, the cutting accuracy is high, and the reliability is high. <P>SOLUTION: The wire saw apparatus 1 has three multi-grooved rollers 3a, 3b, 3c with one wire 2 being wound therearound, constituting a wire row around which the wire 2 having the diameter of, for example, about 120 microns is wound, and the wire 2 of the wire row is reciprocated by the drive by the drive side multi-grooved roller 3a to be driven by a wire driving motor 4. Further, the wire saw apparatus has bobbins 5a, 5b for winding and delivering the wire 2. An ultrasonic oscillator 13 with which a sliding plate 18 consisting of a carbon fiber composite material is joined is brought into contact with the wire 2 between an object 9 to be cut and the multi-grooved rollers 3b, 3c. The fiber direction of the carbon fiber composite material is matched with the wire traveling direction. The oscillating direction of the ultrasonic oscillator 13 is matched with the cutting direction. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
