| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor of which the characteristic is stable to a stress in assembling. Ž<P>SOLUTION: The acceleration sensor includes a movable electrode 13, first and second fixed electrodes 11 and 12, a substrate 20 and fixed electrode support parts 25. The first and second fixed electrodes 11 and 12 are so disposed as to be opposed to the movable electrode 13. The substrate 20 is for supporting the first and second fixed electrodes 11 and 12. The fixed electrode support parts 25 support the first and second fixed electrode 11 and 12 on the substrate 20 and the respective areas contacting with the first and second fixed electrodes 11 and 12 are smaller than the first and second fixed electrodes 11 and 12. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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