| 摘要 |
PROBLEM TO BE SOLVED: To shorten a transition time from a kerf inspection to a next groove machining scheduled line to efficiently process the groove. SOLUTION: After a first groove 9A is formed, the first groove 9A is imaged by an imaging means 71. After that, a determination means 73 image-processes imaged data to determine the good or wrong state of the first groove 9A. However it positions the machining start point of a second division scheduled line 2B for the groove process to a cutting blade 53 without waiting for the determined results. For the good results of determination, a second groove 9B is formed by setting and operating the cutting blade 53 in the division scheduled line 2B for cutting. The parallel operations of determination of groove state and preparation for starting the next groove process is achieved to efficiently process the groove. COPYRIGHT: (C)2010,JPO&INPIT
|
