发明名称 |
Massenspektrometrieeinheit |
摘要 |
A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion. |
申请公布号 |
DE112008001297(T5) |
申请公布日期 |
2010.04.08 |
申请号 |
DE20081101297T |
申请日期 |
2008.04.14 |
申请人 |
ULVAC INC. |
发明人 |
NAKAJIMA, TOYOAKI;KUROKAWA, YUJIROU;YURI, TSUTOMU;TANAKA, RYOTA;YOSHIDA, SHUJI |
分类号 |
G01N27/62;H01J41/10;H01J49/42 |
主分类号 |
G01N27/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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