发明名称 |
STAMP AND STAMPING METHOD USING THEREOF |
摘要 |
<p>PURPOSE: A stamp and a method for forming an ultra fine shape are provided to perform a smooth patterning process by forming a multilayer stamp made of an elastic material. CONSTITUTION: A stamp includes a support unit(30), a stamping unit(31), and a coating layer(27). The support unit is made of a first material with an elastic force. The stamping unit is formed on the support unit and is made of a second material with larger intensity than the first material. The coating layer is coated on the stamping layer.</p> |
申请公布号 |
KR20100036484(A) |
申请公布日期 |
2010.04.08 |
申请号 |
KR20080095728 |
申请日期 |
2008.09.30 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
LEE, KYEONG KYUN;LEE, SUNG KOO |
分类号 |
H01L21/027;G03F7/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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