发明名称 STAMP AND STAMPING METHOD USING THEREOF
摘要 <p>PURPOSE: A stamp and a method for forming an ultra fine shape are provided to perform a smooth patterning process by forming a multilayer stamp made of an elastic material. CONSTITUTION: A stamp includes a support unit(30), a stamping unit(31), and a coating layer(27). The support unit is made of a first material with an elastic force. The stamping unit is formed on the support unit and is made of a second material with larger intensity than the first material. The coating layer is coated on the stamping layer.</p>
申请公布号 KR20100036484(A) 申请公布日期 2010.04.08
申请号 KR20080095728 申请日期 2008.09.30
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 LEE, KYEONG KYUN;LEE, SUNG KOO
分类号 H01L21/027;G03F7/00 主分类号 H01L21/027
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