| 发明名称 |
CORROSION-RESISTANT MEMBER AND METHOD FOR PRODUCTION THEREOF |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a corrosion-resistant member comprising a ceramic member having excellent corrosion-resistant characteristics and low volume resistivity, and to provide a method for production thereof. <P>SOLUTION: The corrosion-resistant member comprises the ceramic member obtained by burning a ceramic molded article containing yttrium oxide as a main component and elemental cerium in a non-oxidation atmosphere. The ceramic member has excellent corrosion-resistant characteristics and low volume resistivity. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2010077017(A) |
申请公布日期 |
2010.04.08 |
| 申请号 |
JP20090197028 |
申请日期 |
2009.08.27 |
| 申请人 |
TOTO LTD |
发明人 |
IDE TAKAYUKI;ANDO MASAMI;OBATA HIROMI |
| 分类号 |
C04B35/50;H01L21/3065;H05H1/46 |
主分类号 |
C04B35/50 |
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