| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process processing apparatus which does not need an expensive and high-accuracy stage, is low in manufacturing cost, can reduce manufacturing cost of a product, and excels in processing accuracy. Ž<P>SOLUTION: A section 17 for determining need for a displacement measurement determines the presence of displacement measurement of an actual position to a target position of a process processing section 3 in the subscanning direction 9. A section 18 of computing compensation movement amount computes a compensating movement amount in the subscanning direction 9 of the process processing section 3, based on a newly measured displacement or displacement stored beforehand based on the determination of the section 17 of determining the need for displacement measurement. A stage controller 13 controls the movement in the subscanning direction 9 of the process processing section 3, according to the compensation movement amount computed by the section 18 of computing compensating movement amount. A section of adjustment processing of camera position 20 controls movement of a section of adjustment of camera position 21 referring to a camera position storage section 11d according to scanning speed of a main scanning section 6. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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