发明名称 Length measuring apparatus
摘要 The present application relates to an optical length measuring apparatus using a laser beam, and has a proposition to enable highly accurate measuring. There includes a length measuring section measuring a distance to a subject and having a measuring laser beam source, a calibration laser beam source emitting a laser beam having a wavelength stability higher than that of a laser beam of the measuring laser beam source, an interference optical system bringing the laser beam of the measuring laser beam source and the laser beam of the calibration laser beam source into interference, and an arithmetic processing section performing a calculation of the distance based on an output of the interference optical system and an output of the length measuring section.
申请公布号 US2010085574(A1) 申请公布日期 2010.04.08
申请号 US20090591156 申请日期 2009.11.10
申请人 NIKON CORPORATION 发明人 TAKAHASHI AKIRA
分类号 G01B11/06;G06F15/00 主分类号 G01B11/06
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