ABERRATION-CORRECTING METHOD, LASER PROCESSING METHOD USING THE ABERRATION-CORRECTING METHOD, LASER IRRADIATION METHOD USING THE ABERRATION-CORRECTING METHOD, ABERRATION-CORRECTING DEVICE AND ABERRATION-CORRECTING PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide an aberration-correcting method which can increase the assembling degree of laser light even if a laser-irradiating position to a medium is deep.

SOLUTION: In one embodiment of an aberration-correcting method, the aberration-correcting method for a laser-irradiating device 1 that concentrates laser light inside a medium 60 that transmits light is characterized in that laser light aberration is corrected so that the point of convergence of the laser light is positioned in the region of the aberration generated in the medium. If the refractive index of the medium 60 is n, the depth of the medium 60 from the plane of incidence to the focal point of the lens 50 is d and the aberration generated by the medium 60 is Δs, the region of aberration is between n×d and n×d+Δs from the incident plane of the medium 60.

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