| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion exposure device which quickly detects a liquid spilling from a substrate stage onto a surface plate. <P>SOLUTION: The immersion exposure device includes a projection optical system 13 for projecting a pattern of an original R onto a substrate W and exposes the substrate W with a liquid filled in a space between the last surface of the projection optical system 13 and the substrate W. The immersion exposure device is provided with a substrate stage WST holding the substrate W and moving on a surface plate 200 and a sensor 100 disposed on a side surface of the substrate stage WST to detect a liquid 110 on the surface plate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
