| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To highly efficiently perform a machining in a laser beam machining method and a laser beam machining apparatus. <P>SOLUTION: The laser beam machining method comprises steps of: (a) measuring a first alignment mark position and, on the basis of the position so measured to decide a first machining position; (b) measuring a second alignment mark position different from the first and, on the basis of the position so measured to decide a second machining position; and (c) scanning a laser beam on the basis of the first machining position decided in the step (a) during the period of performing the step (b). <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
