| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the pitch variation when a plurality of channels are formed by cutting a piezoelectric element and at least two acoustic matching layers, to effectively join a first control signal substrate to the piezoelectric element, and to effectively secure the conductivity between the members. Ž<P>SOLUTION: The ultrasonic probe includes: a packing material; the first control signal substrate formed on the packing material; the plurality of channels formed by layering the piezoelectric element and the at least two acoustic matching layers on the first control signal substrate and by dicing from the uppermost acoustic matching layer to the surface of the first control signal substrate; and a second control signal substrate formed on these channels. The ultrasonic probe is characterized by a lead-free soldered alloy including at least 88 wt.% tin which is interposed at least between the first control signal substrate and the piezoelectric element among the adjacent members from the first control signal substrate to the second control signal substrate to join the members. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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