SURFACE TREATMENT APPARATUS

摘要

A gas flow in openings, which are arranged on a surfaced treatment tank for the purpose of carrying in and out a subject to be treated, is stabilized. A subject to be treated (9) is carried into a treatment tank (10) in the transfer direction from a carry-in opening (13), and is arranged in a treatment space (19).  A treatment gas is supplied to the treatment space (19) from a supply system (30), and the surface of the subject to be treated (9) is treated.  Then, the subject to be treated (9) is carried out from a carry-out opening (14).  The gas is released from the inside of the treatment tank (10) by means of an air-release system (40).  The openings (13, 14) are defined by a pair of flow-straightening surfaces (17, 18), which face each other with a facing distance (D) therebetween in the facing direction which orthogonally intersect with the transfer direction.  The depth (L) of the openings (13, 14) in the transfer direction is set double the facing direction (D) or more, and preferably, six times or more.