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发明名称
Prozesslinie und Verfahren zum Steuern eines Ätzprozesses
摘要
申请公布号
DE10296328(B4)
申请公布日期
2010.04.08
申请号
DE20021096328
申请日期
2002.01.25
申请人
ADVANCED MICRO DEVICES INC.
发明人
LANSFORD, JEREMY S.;FAULK, LAURA
分类号
H01L21/306;H01L21/3065;H01L21/00
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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