发明名称 |
CORROSION-RESISTANT MEMS COMPONENT, AND METHOD FOR THE PRODUCTION THEREOF |
摘要 |
An MEMS component including a monolithically integrated electronic component with a multi-plane conductor track layer stack which is arranged on a substrate and into which is integrated a cantilevered elastically movable metallic actuator which is arranged in the multi-plane conductor track layer stack at the level of a conductor track plane and is connected by via contacts to conductor track planes which are arranged thereabove or therebeneath and which apart from an opening in the region of the actuator are separated from the conductor track plane of the actuator by a respective intermediate plane insulator layer, wherein the actuator is formed from a metallically conductive layer or layer combination which is resistant to corrosive liquids or gases and which contains titanium nitride or consists of titanium nitride. |
申请公布号 |
EP2170762(A2) |
申请公布日期 |
2010.04.07 |
申请号 |
EP20080774477 |
申请日期 |
2008.06.27 |
申请人 |
IHP GMBH-INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS / LEIBNIZ-INSTITUT FUER INNOVATIVE MIKROELEKTRONIK |
发明人 |
DREWS, JUERGEN;EHWALD, KARL-ERNST;SCHULZ, KATRIN |
分类号 |
B81B7/00;G01N11/16 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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地址 |
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