SUBSTRATE LOADING MECHANISM AND SUBSTRATE PROCESSING APPARATUS,申请号KR20060094970-传众专利搜索

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发明名称	SUBSTRATE LOADING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR100951148(B1)	申请公布日期	2010.04.07
申请号	KR20060094970	申请日期	2006.09.28
申请人		发明人
分类号	H01L21/687;H01L21/205	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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