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发明名称
PROCESS FOR IRRADIATION PRODUCING CONSTANT DEPTH/DOSE PROFILE
摘要
申请公布号
EP1221167(B1)
申请公布日期
2010.04.07
申请号
EP20000953787
申请日期
2000.08.01
申请人
NUTEK CORPORATION
发明人
JOEHNK, EDWARD, J.;BRAVO, SERGIO, E.
分类号
G21K5/00;G21K5/04;H01J37/20
主分类号
G21K5/00
代理机构
代理人
主权项
地址
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