发明名称
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a heat treatment furnace with low energy consumption capable of obtaining an ideal heat treating condition of a heat treating object, and further, capable of easily removing broken pieces from the top of a conveying part in the case there is an occurrence of breakage of the heat treating object on the conveying part inside a furnace. <P>SOLUTION: The heat treating furnace is equipped with: an injection side conveying mechanism as a conveying mechanism for conveying the heat treating object 51, for injecting the heat treating object 51 into the furnace and conveying it to a predetermined position; and a carry-out side conveying mechanism for receiving the heat treating object 51 at the predetermined position from the injection side conveying mechanism and conveying it to the outside of the furnace from the predetermined position. The injection side conveying mechanism and the carry-out side conveying mechanism each convey the heat treating object 51 by beams 22, 32 having a cantilever structure for operating periodically at a predetermined cycle. The entire beams 22, 32 of the injection side conveying mechanism and the carry-out conveying mechanism become the condition of being completely outside the furnace at the time of injection and taking out of the heat treating object 51. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP4445476(B2) 申请公布日期 2010.04.07
申请号 JP20060045140 申请日期 2006.02.22
申请人 发明人
分类号 F27B9/24;F27B9/36;F27B9/38;F27B9/39;F27D3/00;F27D7/02;H01L31/04 主分类号 F27B9/24
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