发明名称 Semiconductor device having strip-shaped channel and method for manufacturing such a device
摘要 The invention relates to a semiconductor device (10) consisting of a substrate (11) and a semiconductor body (2) comprising a strip-shaped semiconductor region (3,3A,3B) of silicon in which a field effect transistor is formed, wherein a source region (4) of a first conductivity type, a channel region (33) of a second conductivity type opposed to the first, and a drain region (5) of the first conductivity type are arranged in succession, successively, seen in the longitudinal direction of the strip-shaped semiconductor region (3,3A,3B), and wherein the channel region (33) is provided with a gate dielectric (6), on which a first gate electrode (7) is present on a first vertical side of the strip-shaped semiconductor region (3,3A,3B), which gate electrode (7) is provided with a first connection region (7A), and on which a second gate electrode (8) is present on a second vertical side of the strip-shaped semiconductor region (3,3A,3B) positioned opposite the first vertical side, which second gate electrode (8) is provided with a second connection region (8A). According to the invention the first and second gate electrodes (7,8) completely fill the space on either side of the strip-shaped semiconductor region (3,3A,3B) over the width of the connection regions (7A,8A). In a preferred embodiment the gate electrodes (7,8) each border a horizontal side of the strip-shaped semiconductor region (3,3A,3B). The device (10) according to the invention is very compact, suitable for the sub 45 nm domain and easy to manufacture.
申请公布号 US7691695(B2) 申请公布日期 2010.04.06
申请号 US20050813015 申请日期 2005.12.19
申请人 NXP B.V. 发明人 PONOMAREV YOURI V
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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