发明名称 |
Bimetallic probe with tip end |
摘要 |
It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.
|
申请公布号 |
US7692438(B2) |
申请公布日期 |
2010.04.06 |
申请号 |
US20050565156 |
申请日期 |
2005.05.19 |
申请人 |
NATIONAL INSTITUTE FOR MATERIALS SCIENCE;JAPAN ELECTRONIC MATERIALS CORPORATION |
发明人 |
MACHIDA KAZUMICHI;URATA ATSUO;KONNO TAKESHI;ISHIDA AKIRA;EGASHIRA MITSURU;KOBAYASHI MIKIHIKO |
分类号 |
G01R31/02;G01R1/067;H01L21/66 |
主分类号 |
G01R31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|