发明名称 Bimetallic probe with tip end
摘要 It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probe 100 comprises a columnar contact part 110 which can come in contact with an electrode 10 of an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part 110, the contact part 110 comprises a base part 111 and an expansion part 111a bonded to an end of the base part 111 in a width direction, and the expansion part 111a is formed of a material having a thermal expansion coefficient higher than that of the base part 111.
申请公布号 US7692438(B2) 申请公布日期 2010.04.06
申请号 US20050565156 申请日期 2005.05.19
申请人 NATIONAL INSTITUTE FOR MATERIALS SCIENCE;JAPAN ELECTRONIC MATERIALS CORPORATION 发明人 MACHIDA KAZUMICHI;URATA ATSUO;KONNO TAKESHI;ISHIDA AKIRA;EGASHIRA MITSURU;KOBAYASHI MIKIHIKO
分类号 G01R31/02;G01R1/067;H01L21/66 主分类号 G01R31/02
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