发明名称 Controller and method to mediate data collection from smart sensors for fab applications
摘要 The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.
申请公布号 US7693687(B2) 申请公布日期 2010.04.06
申请号 US20060566632 申请日期 2006.12.04
申请人 MKS INSTRUMENTS, INC. 发明人 LEV-AMI UZI;SIFNATSCH GUENTER;ATTWOOD MARK
分类号 G06F17/18;G05B19/418;G05B23/02;G06F19/00 主分类号 G06F17/18
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