SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFERING METHOD, AND RECORDING MEDIUM OF RECORDING COMPUTER PROGRAM,申请号KR20070128155-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFERING METHOD, AND RECORDING MEDIUM OF RECORDING COMPUTER PROGRAM
摘要
申请公布号	KR100951149(B1)	申请公布日期	2010.04.07
申请号	KR20070128155	申请日期	2007.12.11
申请人		发明人
分类号	H01L21/3065;H01L21/02	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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