| 摘要 |
PROBLEM TO BE SOLVED: To improve the working efficiency in an isolator by shortening a time required for a sterilization process. SOLUTION: The isolator is configured to preheat catalyst for decomposing a sterilization subject, which is provided in a sterilization substance decomposition section 54, to a predetermined reaction temperature while supplying sterilization gas generated by a sterilization substance supply section 200 to a working chamber 10 and sterilizing the working chamber 10, and after finishing the sterilization of the working chamber 10, immediately start the decomposition of the sterilization substance by the sterilization substance decomposition section 54 and exhaust the gas from an exhaust port 58. COPYRIGHT: (C)2010,JPO&INPIT |
