| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS sensor in which the entire body has low-profile, a movable electrode section is stably supported, and an operating margin for the movable electrode section is secured. SOLUTION: In the MEMS sensor, a function layer 10 includes a fixed electrode section, the movable electrode section, and a frame body layer 25 which are separated from a silicon wafer. A conductive supporting section 12 of the fixed electrode section, a conductive supporting section 17 of the movable electrode section, the frame body layer 25, and a first substrate 1 are fixed by first insulating layers 3a, 3b, 3c. A second insulating layer 30 is formed on a second substrate 2. Connection electrode sections 31, 32 and seal electrode sections 33 are formed on the surface of the second insulating layer 30 and are bonded together with connection metal layers 41, 42 and a sealing metal layer 43 by eutectic bonding or diffusion bonding, so that a movable range of a weight portion 20 is sealed by a metallic seal layer. COPYRIGHT: (C)2010,JPO&INPIT
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