| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology capable of surely holding an object to be carried in high temperature environments for high-speed conveyance and minimizing dust during the conveyance of the object. SOLUTION: A conveyor 50 includes a stretchable link mechanism 20 having a plurality of arms to which power is transmitted from a driving source and a mount 5 coupled via a third left arm 3L and a third right arm 3R adjacent to each other at a working tip of the link mechanism 20 for mounting a substrate 10. The mount 5 has locks 5a and 5b provided in contact with a side of the substrate 10 for locking. An elastic urging member 6 having an urging part 6a in contact with the side of the substrate 10 for urging the substrate 10 against the locks 5a and 5b of the mount 5 are fixed to the adjacent arms 3L and 3R of the mechanism 20. The urging member 6 is structured to cause a distance of the urging part 6a from the locks 5a and 5b of the mount 5 to vary depending on relative angle relation between the left arm 3L and the right arm 3R. COPYRIGHT: (C)2010,JPO&INPIT
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