RETICLE STORAGE DEVICE AND RETICLE STORAGE METHOD

摘要

PROBLEM TO BE SOLVED: To suppress reticle haze from being generated at exposure by cleaning the atmosphere in a pellicle during storage.

SOLUTION: This reticle storage device 10 stores in a stocker 20 a reticle to which the pellicle comprising a support frame having an air vent hole and a pellicle film stretched over the support frame is fixed. The reticle storage device 10 comprises a gas flow passage 30 for purging the stocker 20 respectively by first gas (nitrogen gas) and second gas (dried air) having higher transmissivity to the pellicle film than the first gas.

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