发明名称 METHOD AND DEVICE OF MEASURING OPTICAL CHARACTERISTICS
摘要 PROBLEM TO BE SOLVED: To improve in a simple manner the resolution with respect to a point image in a method and a device of measuring an optical characteristics for obtaining a point image intensity distribution in an optical system to be detected. SOLUTION: The method of measuring an optical characteristics is adapted to obtain a point image intensity distribution of an optical system to be detected, in such a manner that light from a point light source is incident on the optical system to be detected and an point image by the optical system to be detected is captured by means of an image capturing device. The lights from a plurality of point light sources are incident on the optical system to be detected; the interval between the plurality of light sources is made, in such a manner that a plurality of point images by the optical system to be detected are positioned on different positions of pixels of the image capturing device; and at least portions at inner side rather than the external peripheral parts do not overlap one another. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010071747(A) 申请公布日期 2010.04.02
申请号 JP20080238108 申请日期 2008.09.17
申请人 NIKON CORP 发明人 FUJII TORU;ITO HIROSHI
分类号 G01M11/02 主分类号 G01M11/02
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