| 摘要 |
<P>PROBLEM TO BE SOLVED: To stabilize discharge characteristics of ink, and to improve an abrasion resistance characteristic and an alkali resistance characteristic of a liquid repelling film. Ž<P>SOLUTION: A liquid repelling film formation method is used for forming a liquid repelling film having a liquid repelling characteristic on the surface of a nozzle formation substrate having a nozzle hole. The liquid repelling film formation method includes: a first step of forming a first base layer composed of a plasma-polymerized film in a region on a first surface side of the nozzle formation substrate and other than a predetermined region including the nozzle hole; a second step of forming a second base layer composed of a plasma-polymerized film in a predetermined region including the first base layer and the nozzle hole; a third step of subjecting the surface of the second base layer to oxidation treatment in a gas atmosphere having a dew point of -40 to 20°C and introducing a hydroxyl group and/or absorption water; and a fourth step of forming the liquid repelling film on the second base layer which has been subjected to the oxidation treatment. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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