METHOD AND DEVICE FOR COATING LIQUID DROPLET

摘要

PROBLEM TO BE SOLVED: To improve accuracy in detecting impact positions of liquid droplets to a substrate. SOLUTION: The method includes a first step of detecting the impact positions of the liquid drops that positions the imaging visual field of an imaging device 30 in a first image pick-up range F1 including three droplets or more on the substrate in the droplets coating direction to perform image processing on the images of the droplets imaged by the imaging device 30 in the first image pick-up range F1 by an image processor and a second step of detecting the impact positions of the droplets by fixing the next image pick-up range of the imaging device 30 to a second image pick-up range F2 including at least two droplets included in the first image pick-up range F1 and three droplets or more on the substrate composed of new droplets that are not included in the first image pick-up range F1 by the relative movement of the substrate and imaging device 30 to perform image processing on images of droplets imaged by the imaging device 30 in the second image pick-up range F2. COPYRIGHT: (C)2010,JPO&INPIT