| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of reducing variations in properties among products, and a method of manufacturing the acceleration sensor. Ž<P>SOLUTION: The acceleration sensor includes: a first structure which has a fixed part provided with an opening, a displacement part disposed in this opening to perform displacement with respect to the fixed part, and connecting parts for connecting the fixed part with the displacement part; a second structure which has a weight part joined to the displacement part, and a seating disposed surrounding the weight part and joined to the fixed part, and is disposed while being laminated on the first structure; and piezoresistive elements which are disposed in the connecting sections, and whose impurity densities are substantially constant in at least their depth directions. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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