| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum equipment in which folding operation of a sample exchange rod equipped in the vacuum equipment such as an electron microscope can be carried out by an operator excellently. Ž<P>SOLUTION: The vacuum equipment is equipped with a sample chamber which is evacuated, a sample exchange chamber connected to the sample chamber through an open/close valve, and a sample exchange rod 1 which penetrates through a side wall of the sample exchange chamber, and is foldable in order to transport a sample supported at the tip part between the inside of the sample chamber and the inside of the sample exchange chamber through the open/close valve. The sample exchange rod 1 has a shaft 5 and a pipe 6 to cover the surrounding of the shaft 5. On the outside of the sidewall 11 of the sample exchange chamber, an engaging member 20 is installed of which the engaging operation with the shaft 5 is braked when abutting on the pipe 6 side face of the sample exchange rod 1, and which limits movement of the pipe 6 by being engaged with the shaft 5 and brought into contact with one end of the pipe 6 when abutting on the shaft 5 side face exposed from the pipe 6 of the sample exchange rod 1. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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