| 摘要 |
PROBLEM TO BE SOLVED: To provide a position measuring device which can increase flexibility as much as possible when a transmitter and a receiver are specifically arranged with respect to a deflection part corresponding to them. SOLUTION: In the position measuring device in which while the transmitter 1 and receiver 5 are arranged in a same space region in front of a same (for example, a first) surface of a scale support 3, the deflection part 4 (composed of one part or a plurality of parts) which serves to change the direction of an electromagnetic wave transmitted from the transmitter toward the receiver is equipped in another (a second) space region R2 of opposite (a second) surface 32 to the transmitter and receiver, of the scale support, a device 2 which puts the electromagnetic wave transmitted from the transmitter 1 into parallel electromagnetic wave beams L1, and which collimates the electromagnetic wave L transmitted from the transmitter 1 is counterposed to the transmitter 1. COPYRIGHT: (C)2010,JPO&INPIT |
