| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck that uses an inorganic material for a dielectric layer and prevents characteristics of heat resistance, corrosion resistance, surface flatness, etc., as advantages of the inorganic material from being degraded, and generates attracting force similar to that of an electrostatic chuck using an organic material such as polyimide for a dielectric layer. SOLUTION: The electrostatic chuck has the dielectric layer 3 on a base made of a conductive silicon substrate 1, wherein the dielectric layer 3 is formed of a single crystal thin film made of one of AlN, GaN, and AlGaN and having a dielectric breakdown electric field strength of≥1 MV/cm on the silicon substrate 1 with a buffer layer 2 interposed, and the buffer layer 2 has a multilayered structure formed by laminating a first nitride semiconductor single crystal layer formed on the silicon substrate 1 and a second nitride semiconductor single crystal layer made of a different material or having a different composition from the first nitride semiconductor single crystal layer alternately in this order. COPYRIGHT: (C)2010,JPO&INPIT |
