| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic focusing device that obtains a focusing state fast with high precision. SOLUTION: A triangulation displacement gauge 10 includes a laser light projection unit 11 and a light reception unit 12, and is disposed such that the bisector of the angle that an optical axis 11a of the projection unit 11 and an optical axis 12a of the light reception unit 12 contain substantially matches an optical axis of an objective 3. At this time, the focus of the objective 3 is arranged so as to be put within a measurement range of the triangulation displacement gauge 10. A correspondence relation between a position output of the triangulation displacement gauge 10 and the position of the objective 3 is stored in a controller 14, which uses the correspondence relation to perform a focusing operation based upon the signal of the triangulation displacement gauge 10. COPYRIGHT: (C)2010,JPO&INPIT |
