| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nozzle device capable of detecting deviation of a nozzle position and correcting it when deviation of the nozzle position occurs. Ž<P>SOLUTION: This nozzle device is provided with nozzle travel amount detecting means 63, 65, 71 for detecting amount of travel of a nozzle 22, travel direction detecting means 64, 66, 71 for detecting the direction of travel of the nozzle 22, and a means 71 for comparing the direction of actual travel and the amount of actual travel with the specified direction of travel and the specified amount of travel set and stored in advance. While a control means 60 detects and determines whether the amount of travel of the washing nozzle 22 detected by the nozzle travel amount detecting means 63, 65, 71 and the direction of travel of the washing nozzle 22 detected by the travel direction detecting means 64, 66, 71 are deviated from the set amount of travel and the set direction of travel being targets or not, the nozzle 22 is driven by a motor to perform the washing operation with high precision. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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