| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress warpage caused by electrodes used for driving during calcining, and to inspect the presence of cracks from a pressure room side in a plurality of piezoelectric layers. Ž<P>SOLUTION: An inkjet head 3 includes a cavity unit 11 having a plurality of the pressure rooms 14Aa and a plurality of nozzles communicating with the respective pressure rooms 14Aa, and a lamination type piezoelectric actuator 12 fixed to the cavity unit 11. The piezoelectric actuator 12 is constituted of a plurality of the piezoelectric layers 12a and 12b, drive electrodes 21 and 22 used for driving and a dummy electrode 23 which are laminated in the thickness direction. The dummy electrode 23 is positioned at the pressure room 14Aa side in the laminating direction of the laminated body. The warpage caused by the electrodes 21 and 22 used for driving during calcining is suppressed, and there is the function of inspecting the presence of the cracks from the pressure room 14Aa side of the piezoelectric layer 15. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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