发明名称 |
PEELING METHOD, PEELING METHOD OF RECODING MEDIUM, AND PEELING DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a peeling method preventing a resin from being unevenly applied on a surface of a substrate and preventing dust adhesion thereto in a peeling step. Ž<P>SOLUTION: In the peeling method for peeling a mold 1 having a rugged shape and the resin applied onto the substrate 2 having an area equal to or smaller than that of the mold 1 and stuck to the mold 1 from each other, the mold 1 is bent by applying pressure to the mold 1 and the resin is peeled from the mold 1 in a radial direction from an outer periphery of the substrate 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2010073276(A) |
申请公布日期 |
2010.04.02 |
申请号 |
JP20080241323 |
申请日期 |
2008.09.19 |
申请人 |
TOSHIBA CORP |
发明人 |
TANAKA KUNIYOSHI;YUZAWA AKIKO;SHIRATORI SATOSHI |
分类号 |
G11B5/84;B29C59/02;H01L21/027 |
主分类号 |
G11B5/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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