发明名称 PEELING METHOD, PEELING METHOD OF RECODING MEDIUM, AND PEELING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a peeling method preventing a resin from being unevenly applied on a surface of a substrate and preventing dust adhesion thereto in a peeling step. Ž<P>SOLUTION: In the peeling method for peeling a mold 1 having a rugged shape and the resin applied onto the substrate 2 having an area equal to or smaller than that of the mold 1 and stuck to the mold 1 from each other, the mold 1 is bent by applying pressure to the mold 1 and the resin is peeled from the mold 1 in a radial direction from an outer periphery of the substrate 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010073276(A) 申请公布日期 2010.04.02
申请号 JP20080241323 申请日期 2008.09.19
申请人 TOSHIBA CORP 发明人 TANAKA KUNIYOSHI;YUZAWA AKIKO;SHIRATORI SATOSHI
分类号 G11B5/84;B29C59/02;H01L21/027 主分类号 G11B5/84
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