| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for processing a tip of a probe which more simply and more accurately processes the probe. Ž<P>SOLUTION: A probe tip polishing apparatus includes: a fixture provided with a cylindrical holding section for movably holding the probe; and a stage having a surface to which a polishing sheet is attached. The stage is rotated, and polishes the tip of the probe in a state that the tip of the probe contacts the polishing sheet. The probe is downwardly moved so as to polish the tip of the probe while the tip is polished. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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