| 摘要 |
PURPOSE: A gas feed assembly constitutes the gas service pipe with the dual structure. The gas of the uniform pressure is of resentment died through a plurality of whole of the substrates. CONSTITUTION: A gas feed assembly(100) comprises the first gas service pipe(300), and the second gas service pipe and gas return pipe(500). The second gas service pipe is installed inside the first gas service pipe. It faces in the first gas service pipe and the gas return pipe locates. In the first gas service pipe, and the second gas service pipe and gas return pipe, the first gas supply hole(310) of the respective plurality of, and a plurality of second gas supply holes and plurality of gas recovery holes(510) are formed. |
