| 摘要 |
PROBLEM TO BE SOLVED: To solve nonuniformity of sensitivity by adjusting the sensitivity of an optical sensor array wherein sensitivity has became ununiform. SOLUTION: An amplification stage laser 11 of two-stage laser equipment configured by an oscillation stage laser 10 and the amplification stage laser 11 is singly oscillated to generate light having a spectral width wider than a free spectral width (FSR) of an etalon 1b. This light is made incident to a spectrum measuring instrument 1, and then incident to a sensor surface of a CCD sensor 1d through the etalon 1b, etc. A compensation factor-constant calculating portion 2b of a CCD controller 2 calculates a compensation factor-compensation constant for compensating degradation for each channel of the CCD sensor 1d, and based on this constant, gain of a variable gain means 2c is controlled, and sensitivity is compensated for each channel of the CCD sensor 1d to uniformize the sensitivity. COPYRIGHT: (C)2010,JPO&INPIT
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