| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid cell for terahertz spectroscopic analysis having no restriction of a material usable for a substrate, and no clogging of a channel. Ž<P>SOLUTION: In a plasma polymerization process, a plasma polymerization film 13 is formed on the first substrate 11, and in a lamination process, the first substrate 11 and the second substrate 12 are laminated together. Since the plasma polymerization film 13 is utilized for lamination of the first substrate 11 and the second substrate 12, high-temperature treatment is not required, and a material bondable at room temperature can be selected in a wide range as the material for the first substrate 11. Besides, since an adhesive is not used, chemical resistance is improved, and the channel 1B is not clogged by an adhesive. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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