| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage apparatus capable of determining and predicting a proper replacement time of a replacement component consumed due to the movement of a movable part such as a cable guide. <P>SOLUTION: The stage apparatus includes the movable part movable in at least one direction and a position sensor for detecting a position of the movable part along the movement direction and includes a measuring instrument which counts a frequency with which the position of the movable part detected by the position sensor has passed second coordinates set on a movement range of the movable part after passing first coordinates set within the movement range, and stores the count value. <P>COPYRIGHT: (C)2010,JPO&INPIT |
