| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma processing apparatus capable of correctly detecting the lifetime of a microwave transmission member, and to provide a method of inspecting the apparatus. <P>SOLUTION: The plasma processing apparatus generates a plasma-generated object from a process gas using plasma excited by microwave and processes a workpiece, and is characterized by a microwave transmission member for introducing microwave to a region wherein the plasma is excited, and a thickness detection means to detect the thickness of the microwave transmission member directly. <P>COPYRIGHT: (C)2010,JPO&INPIT |
