摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device for deflecting a laser beam, which achieves high scanning speed. <P>SOLUTION: A deflection device 2 is provided which deflects a laser beam 200 in a scanning plane perpendicular to a rotating axis line c with a deflection mirror 21 arranged so as to be moved around the rotating axis line c. A light beam forming optical element 22 configured to emit the laser beam 200 onto the deflection mirror 21, the laser beam 200 having a beam width reduced in the direction of the rotating axis line c, is arranged upstream of the deflection mirror 21, the deflection mirror 21 has a mirror width in the direction of the rotating axis line c narrower than the incident width of the laser beam 200 which is not reduced at the upstream the light beam forming optical element 22. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |