发明名称 HEAT ROLLER, SHEET STICKING DEVICE AND STICKING METHOD
摘要 PROBLEM TO BE SOLVED: To provide: a heat roller which can prevent poor adhesion and the like by stabilizing a temperature in a contact position; a sheet sticking device; and a sheet sticking method. SOLUTION: Since a heating device 43 is provided outside a contact roller 42, a heating temperature of a heater 46 just has to be properly set so that a prescribed temperature is obtained at the time of heating with the heating device 43. Therefore, temperature control is facilitated, and an adhesive sheet S can be heated at a stable temperature, whereby poor adhesion and the like of the adhesive sheet S can be prevented. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010073966(A) 申请公布日期 2010.04.02
申请号 JP20080240946 申请日期 2008.09.19
申请人 LINTEC CORP 发明人 MURAKAMI YUKINORI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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