| 摘要 |
PROBLEM TO BE SOLVED: To provide a hand for conveying a semiconductor wafer, the hand executing positioning of a notch of the wafer and aligning the center position of the wafer to a wafer processor even when a wafer with different diameter is conveyed. SOLUTION: Disclosed is the hand 10 for conveying the semiconductor wafer, which takes out the wafer W from a container to be conveyed to a processor which processes the wafer W, wherein the hand is provided with: a hand member body 12; a hand member 14 movable to the hand member body 12; a holding member 36 movable to the hand member 14; a first rotation member 24 which contacts the wafer W; a second rotation member 56 which rotates the wafer W together with the first rotation member 24; a moving member which moves the hand member and the holding member by the same distance along the direction in which the first rotation member 24 and the second rotation member 56 are separated from each other or approach to each other; and a notch detection means for detecting the notch of the wafer W. COPYRIGHT: (C)2010,JPO&INPIT |
